Invention Grant
US08012832B2 Process for manufacturing a multi-drain electronic power device integrated in semiconductor substrate and corresponding device 有权
用于制造集成在半导体衬底中的多排放电子功率器件和相应器件的工艺

Process for manufacturing a multi-drain electronic power device integrated in semiconductor substrate and corresponding device
Abstract:
A process manufactures a multi-drain power electronic device integrated on a semiconductor substrate of a first type of conductivity whereon a drain semiconductor layer is formed. The process includes: forming a first semiconductor epitaxial layer of the first type of conductivity of a first value of resistivity forming the drain epitaxial layer on the semiconductor substrate, forming first sub-regions of a second type of conductivity by a first selective implant step with a first implant dose, forming second sub-regions of the first type of conductivity by a second implant step with a second implant dose, and forming a surface semiconductor layer. The process also includes forming body regions of the second type of conductivity aligned with the first sub-regions, and carrying out a thermal diffusion process so that the first sub-regions form a single electrically continuous column region aligned and in electric contact with the body regions.
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