Invention Grant
US08012838B2 Method for fabricating lateral double diffused metal oxide semiconductor (LDMOS) transistor 有权
制造横向双扩散金属氧化物半导体(LDMOS)晶体管的方法

  • Patent Title: Method for fabricating lateral double diffused metal oxide semiconductor (LDMOS) transistor
  • Patent Title (中): 制造横向双扩散金属氧化物半导体(LDMOS)晶体管的方法
  • Application No.: US12647513
    Application Date: 2009-12-27
  • Publication No.: US08012838B2
    Publication Date: 2011-09-06
  • Inventor: Nam-Joo Kim
  • Applicant: Nam-Joo Kim
  • Applicant Address: KR Seoul
  • Assignee: Dongbu HiTek Co., Ltd.
  • Current Assignee: Dongbu HiTek Co., Ltd.
  • Current Assignee Address: KR Seoul
  • Agency: Sherr & Vaughn, PLLC
  • Priority: KR10-2009-0000938 20090106
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Method for fabricating lateral double diffused metal oxide semiconductor (LDMOS) transistor
Abstract:
Disclosed is a method for fabricating a lateral double diffused metal oxide semiconductor (LDMOS) transistor, which includes implanting impurity ions onto a semiconductor substrate to form a drift region and a body region, forming a photoresist pattern to expose a region where an insulating oxide film is to be formed on the semiconductor substrate, implanting first impurity ions through the photoresist pattern to form a first impurity region, where the insulating oxide film is to be formed, in the semiconductor substrate, forming an insulating oxide film and an outer insulating oxide film on the semiconductor substrate by an oxidation process, and forming a gate electrode on the semiconductor substrate.
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