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US08012842B2 Method for fabricating isolated integrated semiconductor structures 有权
隔离集成半导体结构的制造方法

Method for fabricating isolated integrated semiconductor structures
Abstract:
An integrated semiconductor structure that has first and second bipolar transistor structures. The first bipolar transistor structure has a doped tank region in contact with a doped tank region located underneath a contacting sinker. The second bipolar transistor structure has a doped buried region that is the same dopant type as its doped tank region. A method for fabricating an integrated semiconductor structure in a bulk semiconductor wafer. A first patterned photomask is used to form a doped buried region and a doped tank region within the first bipolar transistor structure. A second patterned photomask is used to form a doped buried region and a doped tank region within the second bipolar transistor, plus a doped buried region and a doped tank region underneath a contacting sinker adjacent to the first bipolar transistor.
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