Invention Grant
- Patent Title: Systems and methods for preparing epitaxially textured polycrystalline films
- Patent Title (中): 制备外延织构化多晶膜的系统和方法
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Application No.: US12275720Application Date: 2008-11-21
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Publication No.: US08012861B2Publication Date: 2011-09-06
- Inventor: James S. Im
- Applicant: James S. Im
- Applicant Address: US NY New York
- Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee Address: US NY New York
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
The disclosed subject matter relates to systems and methods for preparing epitaxially textured polycrystalline films. In one or more embodiments, the method for making a textured thin film includes providing a precursor film on a substrate, the film includes crystal grains having a surface texture and a non-uniform degree of texture throughout the thickness of the film, wherein at least a portion of the this substrate is transparent to laser irradiation; and irradiating the textured precursor film through the substrate using a pulsed laser crystallization technique at least partially melt the film wherein the irradiated film crystallizes upon cooling to form crystal grains having a uniform degree of texture.
Public/Granted literature
- US20090137105A1 SYSTEMS AND METHODS FOR PREPARING EPITAXIALLY TEXTURED POLYCRYSTALLINE FILMS Public/Granted day:2009-05-28
Information query
IPC分类: