Invention Grant
US08012870B2 Wiring structure between steps and wiring method thereof 失效
步骤之间的布线结构及其布线方法

Wiring structure between steps and wiring method thereof
Abstract:
In a wiring structure between steps in which a step portion is covered by an insulating slope formed by providing and drying droplets of an insulating ink in which an insulating material is dispersed in a dispersion medium and a wiring line formed by drying and firing provided droplets of a conductive ink in which a conductive material is dispersed in a dispersion medium is laid out between the steps and passes on a top surface of the insulating slope, the structure includes a liquid repellent layer formed of a liquid repellent material repelling the dispersion medium in the insulating ink, and a plurality of dot lines including a plurality of dots that is formed by hardening arranged droplets of a resin ink including a resin material. In the structure, the liquid repellent layer covers a surface including the step portion where the wiring line to be laid out. The droplets for forming the dot lines are arranged on a surface of the liquid repellent layer so as not to contact with each other in a region partitioned by a side serving as a start point and a side serving as an end point in a direction in which the wiring line is laid out. The insulating slope is formed by drying the droplets of the insulating ink provided to the step portion so as to connect the plurality of dot lines.
Public/Granted literature
Information query
IPC分类:
H 电学
H01 基本电气元件
H01L 半导体器件;其他类目中不包括的电固体器件(使用半导体器件的测量入G01;一般电阻器入H01C;磁体、电感器、变压器入H01F;一般电容器入H01G;电解型器件入H01G9/00;电池组、蓄电池入H01M;波导管、谐振器或波导型线路入H01P;线路连接器、汇流器入H01R;受激发射器件入H01S;机电谐振器入H03H;扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R;一般电光源入H05B;印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K;在具有特殊应用的电路中使用的半导体器件见应用相关的小类)
H01L21/00 专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/02 .半导体器件或其部件的制造或处理
H01L21/04 ..至少具有一个跃变势垒或表面势垒的器件,例如PN结、耗尽层、载体集结层
H01L21/34 ...具有H01L21/06,H01L21/16及H01L21/18各组不包含的或有或无杂质,例如掺杂材料的半导体的器件
H01L21/46 ....用H01L21/36至H01L21/428各组不包含的方法或设备处理半导体材料的(在半导体材料上制作电极的入H01L21/44)
H01L21/461 .....改变半导体材料的表面物理特性或形状的,例如腐蚀、抛光、切割
H01L21/4763 ......非绝缘层的沉积,例如绝缘层上的导电层、电阻层;这些层的后处理(电极的制造入H01L21/28)
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