Invention Grant
US08013288B2 Method for correcting a control of an optical scanner and the optical scanner
有权
用于校正光学扫描器和光学扫描器的控制的方法
- Patent Title: Method for correcting a control of an optical scanner and the optical scanner
- Patent Title (中): 用于校正光学扫描器和光学扫描器的控制的方法
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Application No.: US12823242Application Date: 2010-06-25
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Publication No.: US08013288B2Publication Date: 2011-09-06
- Inventor: Joerg Steinert , Joerg Engel
- Applicant: Joerg Steinert , Joerg Engel
- Applicant Address: DE Jena
- Assignee: Carl Zeiss MicroImaging GmbH
- Current Assignee: Carl Zeiss MicroImaging GmbH
- Current Assignee Address: DE Jena
- Agency: Jacobson Holman PLLC
- Priority: DE102005047218 20051001
- Main IPC: H01J3/14
- IPC: H01J3/14

Abstract:
In a method for correcting a control of an optical scanner (14) which has a beam deflecting element (31) for deflecting a beam of optical radiation and a drive unit (30, 30′) for moving the beam deflecting element (31), said drive unit deflecting a beam of optical radiation directed at the beam deflecting element (31) according to a predetermined target movement using at least one parameter and/or a transfer function, preferably optical, said parameter or transfer function being used to control or regulate the system. In a determination step at least one current value of a drive unit transfer function that reproduces the response of the drive unit (30, 30′) to a predetermined target movement or a change in a target movement is ascertained for at least one frequency, and in a correction step at least one parameter and/or the transfer function is corrected as a function of the current value of the drive unit transfer function.
Public/Granted literature
- US20100321752A1 METHOD FOR CORRECTING A CONTROL OF AN OPTICAL SCANNER AND THE OPTICAL SCANNER Public/Granted day:2010-12-23
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