Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US10577457Application Date: 2005-08-03
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Publication No.: US08013416B2Publication Date: 2011-09-06
- Inventor: Takamitsu Yamanaka
- Applicant: Takamitsu Yamanaka
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, PC
- Priority: JP2004-237207 20040817; JP2004-237208 20040817; JP2004-237209 20040817; JP2004-237210 20040817; JP2004-237211 20040817
- International Application: PCT/JP2005/014208 WO 20050803
- International Announcement: WO2006/018974 WO 20060223
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
This semiconductor device includes a first device and a second device provided on a semiconductor substrate and having different breakdown voltages. More specifically, the semiconductor device includes a semiconductor substrate, a first region defined on the semiconductor substrate and having a first device formation region isolated by a device isolation portion formed by filling an insulator in a trench formed in the semiconductor substrate, a first device provided in the first device formation region, a second region defined on the semiconductor substrate separately from the first region and having a second device formation region, and a second device provided in the second device formation region and having a higher breakdown voltage than the first device, the second device having a drift drain structure in which a LOCOS oxide film thicker than a gate insulation film thereof is disposed at an edge of a gate electrode thereof.
Public/Granted literature
- US20060289947A1 Semiconductor device and its manufacturing method Public/Granted day:2006-12-28
Information query
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