Invention Grant
US08013416B2 Semiconductor device 有权
半导体器件

  • Patent Title: Semiconductor device
  • Patent Title (中): 半导体器件
  • Application No.: US10577457
    Application Date: 2005-08-03
  • Publication No.: US08013416B2
    Publication Date: 2011-09-06
  • Inventor: Takamitsu Yamanaka
  • Applicant: Takamitsu Yamanaka
  • Applicant Address: JP Kyoto
  • Assignee: Rohm Co., Ltd.
  • Current Assignee: Rohm Co., Ltd.
  • Current Assignee Address: JP Kyoto
  • Agency: Rabin & Berdo, PC
  • Priority: JP2004-237207 20040817; JP2004-237208 20040817; JP2004-237209 20040817; JP2004-237210 20040817; JP2004-237211 20040817
  • International Application: PCT/JP2005/014208 WO 20050803
  • International Announcement: WO2006/018974 WO 20060223
  • Main IPC: H01L21/70
  • IPC: H01L21/70
Semiconductor device
Abstract:
This semiconductor device includes a first device and a second device provided on a semiconductor substrate and having different breakdown voltages. More specifically, the semiconductor device includes a semiconductor substrate, a first region defined on the semiconductor substrate and having a first device formation region isolated by a device isolation portion formed by filling an insulator in a trench formed in the semiconductor substrate, a first device provided in the first device formation region, a second region defined on the semiconductor substrate separately from the first region and having a second device formation region, and a second device provided in the second device formation region and having a higher breakdown voltage than the first device, the second device having a drift drain structure in which a LOCOS oxide film thicker than a gate insulation film thereof is disposed at an edge of a gate electrode thereof.
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