Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12053168Application Date: 2008-03-21
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Publication No.: US08013442B2Publication Date: 2011-09-06
- Inventor: Yoshimasa Amatatsu , Minoru Akaishi , Satoshi Onai , Katsuya Okabe , Yoshiaki Sano , Akira Yamane
- Applicant: Yoshimasa Amatatsu , Minoru Akaishi , Satoshi Onai , Katsuya Okabe , Yoshiaki Sano , Akira Yamane
- Applicant Address: US AZ Phoenix JP Gunma
- Assignee: Semiconductor Components Industries, LLC,Sanyo Semiconductor Co., Ltd.
- Current Assignee: Semiconductor Components Industries, LLC,Sanyo Semiconductor Co., Ltd.
- Current Assignee Address: US AZ Phoenix JP Gunma
- Agency: Morrison & Foerster LLP
- Priority: JP2007-076845 20070323
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
In a semiconductor device according to the present invention, a plurality of opening regions 5 to 8 are formed in an insulating film on a pad electrode 3. A metal layer 9 formed on the pad electrode 3 has a plurality of concave portions 10 to 13 formed therein by covering the opening regions 5 to 8. Moreover, in a peripheral portion at a bottom of each of the concave portions 10 to 13 in the metal layer 9, the metal layer 9 and a Cu plating layer 19 react with each other. By use of this structure, the metal reaction area serves as a current path on the pad electrode 3. Thus, a resistance value on the pad electrode 3 is reduced.
Public/Granted literature
- US20080230899A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2008-09-25
Information query
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