Invention Grant
US08013982B2 Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
有权
可移动体驱动方法和系统，图案形成方法和装置，基于编码器的测量值和秤的平面度的信息来驱动可移动体的曝光方法和装置以及装置制造方法
- Patent Title: Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
- Patent Title (中): 可移动体驱动方法和系统，图案形成方法和装置，基于编码器的测量值和秤的平面度的信息来驱动可移动体的曝光方法和装置以及装置制造方法
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Application No.: US11896412Application Date: 2007-08-31
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Publication No.: US08013982B2Publication Date: 2011-09-06
- Inventor: Yuichi Shibazaki
- Applicant: Yuichi Shibazaki
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-236975 20060831
- Main IPC: G03B27/58
- IPC: G03B27/58
Abstract:
A drive unit drives a wafer stage in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer stage in the Y-axis direction and based on information on the flatness of a scale that is measured by the encoder. In this case, the drive unit can drive the wafer stage in a predetermined direction based on a measurement value after correction in which a measurement error caused by the flatness of the scale included in the measurement value of the encoder is corrected based on the information on the flatness of the scale. Accordingly, the wafer stage can be driven with high accuracy in a predetermined direction using the encoder, without being affected by the unevenness of the scale.
Public/Granted literature
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