Invention Grant
US08013999B2 Beam characterization monitor for sensing pointing or angle of an optical beam
有权
用于感测光束的指向或角度的光束特性监视器
- Patent Title: Beam characterization monitor for sensing pointing or angle of an optical beam
- Patent Title (中): 用于感测光束的指向或角度的光束特性监视器
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Application No.: US12339217Application Date: 2008-12-19
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Publication No.: US08013999B2Publication Date: 2011-09-06
- Inventor: Matthew E. Hansen , Ronald A. Wilklow
- Applicant: Matthew E. Hansen , Ronald A. Wilklow
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G01N21/55
- IPC: G01N21/55
Abstract:
The divergence of an optical beam is determined. An optic is configured to provide internal reflection of at least a part of a beam of radiation scanned over varying angles of incidence on the optic. The optic has a film configured to provide a surface plasmon resonance (SPR) effect. A detector is arranged relative to the optic and configured to electronically detect radiation reflected from the optic. The divergence angle of the beam of radiation is calculated based on a change in reflectance relative to angle of incidence.
Public/Granted literature
- US20090161088A1 Beam Characterization Monitor for Sensing Pointing or Angle of an Optical Beam Public/Granted day:2009-06-25
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