Invention Grant
- Patent Title: Contour sensor incorporating MEMS mirrors
- Patent Title (中): 轮廓传感器结合MEMS镜
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Application No.: US12416463Application Date: 2009-04-01
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Publication No.: US08014002B2Publication Date: 2011-09-06
- Inventor: Shyam P. Keshavmurthy , Chengchih Lin , Alfred A. Pease , Richard A. Krakowski
- Applicant: Shyam P. Keshavmurthy , Chengchih Lin , Alfred A. Pease , Richard A. Krakowski
- Applicant Address: US MI Plymouth
- Assignee: Perceptron, Inc.
- Current Assignee: Perceptron, Inc.
- Current Assignee Address: US MI Plymouth
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G01B11/24
- IPC: G01B11/24

Abstract:
A structured light sensor system for measuring contour of a surface includes an imaging lens system, an image capturing device, a first set of micro electromechanical system (MEMS) mirrors, and a control module. The imaging lens system focuses light reflected from the surface, wherein the imaging lens system has a corresponding lens plane. The image capturing device captures the focused light and generates data corresponding to the captured light, wherein the image capturing device has a corresponding image plane that is not parallel to the lens plane. The first set of MEMS mirrors direct the focused light to the image capturing device. The control module receives the data, determines a quality of focus of the captured light based on the received data, and controls the first set of MEMS mirrors based on the quality of focus to maintain a Scheimpflug tilt condition between the lens plane and the image plane.
Public/Granted literature
- US20090262363A1 CONTOUR SENSOR INCORPORATING MEMS MIRRORS Public/Granted day:2009-10-22
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