Invention Grant
- Patent Title: Regenerative ring resonator
- Patent Title (中): 再生环形谐振器
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Application No.: US12724681Application Date: 2010-03-16
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Publication No.: US08014432B2Publication Date: 2011-09-06
- Inventor: Hong Ye , Richard L. Sandstrom , Slava Rokitski , Daniel J. W. Brown , Robert J. Rafac
- Applicant: Hong Ye , Richard L. Sandstrom , Slava Rokitski , Daniel J. W. Brown , Robert J. Rafac
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino Law LLC
- Main IPC: H01S3/22
- IPC: H01S3/22

Abstract:
A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
Public/Granted literature
- US20110069733A1 REGENERATIVE RING RESONATOR Public/Granted day:2011-03-24
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