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US08014969B2 Test apparatus, test method and manufacturing method 失效
试验装置,试验方法及制造方法

Test apparatus, test method and manufacturing method
Abstract:
There is provided a test apparatus for testing a plurality of devices under test. The test apparatus includes a signal input section that applies a test signal to the devices under test so as to cause the devices under test to concurrently output response signals, a combining section that generates a single combination signal by using the response signals output from the devices under test, and a judging section that judges whether the devices under test operate normally with reference to the combination signal.
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