Invention Grant
- Patent Title: Distance histogram for nearest neighbor defect classification
- Patent Title (中): 最近相邻缺陷分类的距离直方图
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Application No.: US12202251Application Date: 2008-08-30
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Publication No.: US08014973B1Publication Date: 2011-09-06
- Inventor: Tong Huang
- Applicant: Tong Huang
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka, Neely & Graham, P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A method for constructing a distance histogram for nearest neighbor classification. A training sample is determined for each of two classes. For each defect, a distance is measured in the feature space between the defect and the training sample for each of the classes. All of the distances for a given defect are normalized by dividing each distance for the given defect by the sum of all of the distances for the given defect. A histogram is constructed by plotting a chart of the normalized distances versus the number of defects having the distances. A threshold bar is placed on the center of the histogram to construct a normal nearest neighbor classifier. The threshold bar can be adjusted to the left or to the right to construct a weighted nearest neighbor classifier.
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