Invention Grant
US08015693B2 Method of manufacturing a thin-film magnetic head having a lower magnetic pole projection projecting toward an upper magnetic pole 失效
制造具有向上磁极突出的下磁极突起的薄膜磁头的制造方法

Method of manufacturing a thin-film magnetic head having a lower magnetic pole projection projecting toward an upper magnetic pole
Abstract:
A method of forming a thin-film magnetic head comprises a lower magnetic pole layer forming step of forming a lower magnetic pole layer; a lower magnetic pole projection forming step of forming the lower magnetic pole layer with a lower magnetic pole projection; a gap layer forming step of laminating a nonmagnetic gap layer on the lower magnetic pole projection; and an upper magnetic pole forming step of forming an upper magnetic pole on the nonmagnetic gap layer. The lower magnetic pole projection forming step forms the lower magnetic pole projection by simultaneously etching an area including parts adjacent to a part to become the lower magnetic pole projection on both sides in a track width direction and a part adjacent to the part to become the lower magnetic pole projection on the side opposite from a medium-opposing surface in a surface of the lower magnetic pole layer.
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