In the manufacture of a multilayer ceramic substrate including a ceramic laminate by a so-called non-shrink process in which the ceramic laminate disposed between shrinkage control layers is fired, first and second surface conductive films formed on first and second main surfaces of the ceramic laminate may cause warping of the multilayer ceramic substrate after the shrinkage control layers are removed. After the firing step, in removing the shrinkage control layers from a composite laminate, the thickness of at least one of first and second reaction layers formed at interfaces between ceramic green layers and the shrinkage control layers in the firing step is reduced such that the thickness of the first reaction layer is different from the thickness of the second reaction layer, thereby controlling the compressive stress generated by the reaction layers to reduce the warping of the multilayer ceramic substrate.