Invention Grant
US08017461B2 Methods of forming semiconductor-on-insulating (SOI) field effect transistors with body contacts
有权
形成半导体绝缘(SOI)场效应晶体管与体接触的方法
- Patent Title: Methods of forming semiconductor-on-insulating (SOI) field effect transistors with body contacts
- Patent Title (中): 形成半导体绝缘(SOI)场效应晶体管与体接触的方法
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Application No.: US12721944Application Date: 2010-03-11
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Publication No.: US08017461B2Publication Date: 2011-09-13
- Inventor: Sung-young Lee , Dong-suk Shin
- Applicant: Sung-young Lee , Dong-suk Shin
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Myers bigel Sibley & Sajovec, P.A.
- Priority: KR2004-48211 20040625
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
Semiconductor-on-insulator (SOI) field effect transistors include a semiconductor substrate and a first semiconductor active region on a first portion of a surface of the substrate. A first electrically insulating layer is provided. This first electrically insulating layer extends on a second portion of the surface of the substrate and also on a first sidewall of the first semiconductor active region. A second electrically insulating layer is provided, which extends on a third portion of the surface of the semiconductor substrate. The second electrically insulating layer also extends on a second sidewall of the first semiconductor active region. A second semiconductor active region is provided on the first semiconductor active region. The second semiconductor active region extends on the first semiconductor active region and on ends of the first and second electrically insulating layers. Source and drain regions are also provided, which are electrically coupled to opposite ends of the second semiconductor active region. An insulated gate electrode extends on the second semiconductor active region and opposite the first semiconductor active region.
Public/Granted literature
- US20100167474A1 Methods of Forming Semiconductor-On-Insulating (SOI) Field Effect Transistors with Body Contacts Public/Granted day:2010-07-01
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