Invention Grant
- Patent Title: Drive laser delivery systems for EUV light source
- Patent Title (中): 驱动用于EUV光源的激光输送系统
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Application No.: US12322669Application Date: 2009-02-04
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Publication No.: US08017924B2Publication Date: 2011-09-13
- Inventor: Alexander N. Bykanov , Igor V. Fomenkov , Alexander I. Ershov
- Applicant: Alexander N. Bykanov , Igor V. Fomenkov , Alexander I. Ershov
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino Law LLC
- Main IPC: H01J35/20
- IPC: H01J35/20

Abstract:
An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may be configured to expose the optic to a gaseous etchant pressure for optic cleaning while the window is exposed to a lower gaseous etchant pressure to avoid window coating deterioration. In another aspect, an EUV light source may comprise a target material positionable along a beam path to participate in a first interaction with light on the beam path; an optical amplifier; and at least one optic directing photons scattered from the first interaction into the optical amplifier to produce a laser beam on the beam path for a subsequent interaction with the target material to produce an EUV light emitting plasma.
Public/Granted literature
- US20090267005A1 Drive laser delivery systems for euv light source Public/Granted day:2009-10-29
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