Invention Grant
- Patent Title: Ceramic MESFET device and manufacturing method thereof
- Patent Title (中): 陶瓷MESFET器件及其制造方法
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Application No.: US12289485Application Date: 2008-10-29
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Publication No.: US08017941B2Publication Date: 2011-09-13
- Inventor: Chau-Kuang Liau , Wen-Wei Chou
- Applicant: Chau-Kuang Liau , Wen-Wei Chou
- Applicant Address: TW Taoyuan County
- Assignee: Yuan Ze University
- Current Assignee: Yuan Ze University
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW97104511A 20080205
- Main IPC: H01L51/30
- IPC: H01L51/30

Abstract:
A method of manufacturing a MESFET using ceramic materials includes providing a substrate; providing a ceramic semiconductor material to apply onto the substrate to form a first ceramic semiconductor layer; providing a ceramic semiconductor material which is blended with ions, wherein the ceramic semiconductor material is applied onto a central part of the first ceramic semiconductor layer to form a second ceramic semiconductor layer with ions; providing another ion-mixed ceramic semiconductor material is provided to apply over both sides of the first ceramic semiconductor layer to form a third ceramic semiconductor layer having ions; and respectively plating the second and third ceramic semiconductor layers with metal layers so that the second ceramic semiconductor layer has a gate electrode and the third ceramic semiconductor layer has a source and a drain. A transistor obtained by this method can be put into broader range of applications compared to III-V group transistor.
Public/Granted literature
- US20090194765A1 Ceramic MESFET device and manufacturing method thereof Public/Granted day:2009-08-06
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