Invention Grant
- Patent Title: Through-hole contacts in a semiconductor device
- Patent Title (中): 半导体器件中的通孔接触
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Application No.: US12815900Application Date: 2010-06-15
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Publication No.: US08018069B2Publication Date: 2011-09-13
- Inventor: Nishant Sinha
- Applicant: Nishant Sinha
- Applicant Address: US NY Mt. Kisco
- Assignee: Round Rock Research, LLC
- Current Assignee: Round Rock Research, LLC
- Current Assignee Address: US NY Mt. Kisco
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
Devices with conductive through-waver vias. In one embodiment, the device is formed by a method comprising providing a layer of semiconducting material, forming a layer of metal on a first side of the layer of semiconducting material, forming an opening in the layer of semiconducting material to thereby expose a portion of the layer of metal, the opening extending from at least a second side of the layer of semiconducting material to the layer of metal, and performing a deposition process to form a conductive contact in the opening using the exposed portion of the metal layer as a seed layer.
Public/Granted literature
- US20100244261A1 THROUGH-HOLE CONTACTS IN A SEMICONDUCTOR DEVICE Public/Granted day:2010-09-30
Information query
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