Invention Grant
- Patent Title: Micro-oscillation element provided with weight portion, and array utilizing the same
- Patent Title (中): 具有重量部分的微振动元件和利用其的阵列
-
Application No.: US12145063Application Date: 2008-06-24
-
Publication No.: US08018118B2Publication Date: 2011-09-13
- Inventor: Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda , Yoshihiro Mizuno , Tsuyoshi Matsumoto , Ippei Sawaki
- Applicant: Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda , Yoshihiro Mizuno , Tsuyoshi Matsumoto , Ippei Sawaki
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-173078 20070629
- Main IPC: H02N1/00
- IPC: H02N1/00 ; G02B26/08
Abstract:
A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.
Public/Granted literature
- US20090001847A1 MICRO-OSCILLATION ELEMENT AND ARRAY OF MICRO-OSCILLATION ELEMENTS Public/Granted day:2009-01-01
Information query
