Invention Grant
US08018160B2 Magnetron having a feature for collecting material lost from a cathode thereof
有权
具有用于收集从其阴极损失的材料的特征的磁控管
- Patent Title: Magnetron having a feature for collecting material lost from a cathode thereof
- Patent Title (中): 具有用于收集从其阴极损失的材料的特征的磁控管
-
Application No.: US12073467Application Date: 2008-03-05
-
Publication No.: US08018160B2Publication Date: 2011-09-13
- Inventor: Michael Barry Clive Brady
- Applicant: Michael Barry Clive Brady
- Applicant Address: GB Chelmsford
- Assignee: E2V Technologies (UK) Limited
- Current Assignee: E2V Technologies (UK) Limited
- Current Assignee Address: GB Chelmsford
- Agency: Venable LLP
- Agent Robert Kinberg
- Priority: GB0706298.7 20070330
- Main IPC: H01J25/50
- IPC: H01J25/50
Abstract:
A magnetron has a cathode, an anode with vanes, and an insulating surface which faces the cathode and receives material from the cathode due to sputtering at the cathode. A conductor enables the resistance of the film so deposited to be measured, giving an indication of the thickness of the film and the lifetime of the magnetron.
Public/Granted literature
- US20080238558A1 Magnetrons Public/Granted day:2008-10-02
Information query
