Invention Grant
- Patent Title: Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
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Application No.: US12534468Application Date: 2009-08-03
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Publication No.: US08018302B2Publication Date: 2011-09-13
- Inventor: Shogo Inaba , Akira Sato
- Applicant: Shogo Inaba , Akira Sato
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-332444 20051117; JP2005-332445 20051117; JP2006-261135 20060926
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H3/007
Abstract:
A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
Public/Granted literature
- US20090302707A1 MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-12-10
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