Invention Grant
- Patent Title: Method for determining vibration displacement and vibrating frequency and apparatus using the same
- Patent Title (中): 确定振动位移和振动频率的方法及其使用方法
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Application No.: US12478847Application Date: 2009-06-05
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Publication No.: US08018601B2Publication Date: 2011-09-13
- Inventor: Jin-Liang Chen , Liang-Chia Chen , Huang-Chi Huang , Chun-Tai Lien , Yong-Tong Zou , Huang-Wen Lai
- Applicant: Jin-Liang Chen , Liang-Chia Chen , Huang-Chi Huang , Chun-Tai Lien , Yong-Tong Zou , Huang-Wen Lai
- Applicant Address: TW Hsin-Chu TW Taipei
- Assignee: Industrial Technology Research Institute,National Taipei University of Technology
- Current Assignee: Industrial Technology Research Institute,National Taipei University of Technology
- Current Assignee Address: TW Hsin-Chu TW Taipei
- Agency: WPAT, PC
- Agent Justin King
- Priority: TW97138634A 20081008
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface.
Public/Granted literature
- US20100085575A1 METHOD FOR DETERMINING VIBRATION DISPLACEMENT AND VIBRATING FREQUENCY AND APPARATUS USING THE SAME Public/Granted day:2010-04-08
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