Invention Grant
- Patent Title: Imaging optical system
- Patent Title (中): 成像光学系统
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Application No.: US11971640Application Date: 2008-01-09
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Publication No.: US08018650B2Publication Date: 2011-09-13
- Inventor: Hans-Juergen Mann
- Applicant: Hans-Juergen Mann
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007003305 20070117
- Main IPC: G02B17/06
- IPC: G02B17/06 ; G03F7/24 ; H01L21/027

Abstract:
The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.
Public/Granted literature
- US20080170310A1 IMAGING OPTICAL SYSTEM Public/Granted day:2008-07-17
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