Invention Grant
- Patent Title: Material property measurements using multiple frequency atomic force microscopy
- Patent Title (中): 使用多频率原子力显微镜的材料性能测量
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Application No.: US12214031Application Date: 2008-06-16
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Publication No.: US08024963B2Publication Date: 2011-09-27
- Inventor: Roger Proksch , Roger C. Callahan
- Applicant: Roger Proksch , Roger C. Callahan
- Applicant Address: US CA Goleta
- Assignee: Asylum Research Corporation
- Current Assignee: Asylum Research Corporation
- Current Assignee Address: US CA Goleta
- Agency: Law Office of Scott C. Harris, Inc.
- Main IPC: G01B5/28
- IPC: G01B5/28 ; G01Q10/00
Abstract:
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
Public/Granted literature
- US20090013770A1 Material property measurements using multiple frequency atomic force microscopy Public/Granted day:2009-01-15
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