Invention Grant
- Patent Title: Multiple vacuum evaporation coating device and method for controlling the same
- Patent Title (中): 多重真空蒸镀装置及其控制方法
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Application No.: US11370033Application Date: 2006-03-08
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Publication No.: US08025735B2Publication Date: 2011-09-27
- Inventor: Sung Ho Lee , Su Hwan Kim , Min Jeong Hwang
- Applicant: Sung Ho Lee , Su Hwan Kim , Min Jeong Hwang
- Applicant Address: KR Giheung-Gu, Yongin, Gyunggi-Do
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyunggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2005-0019645 20050309
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A multiple vacuum evaporation coating device and a method for controlling the same. The vacuum evaporation coating device includes a plurality of evaporation sources, a rotating part adapted to rotate the plurality of evaporation sources and a coating block plate adapted to block all but one of said plurality of evaporation sources at any time, each of the plurality of evaporation sources comprise a case, a melting pot arranged within said case, an evaporation material arranged within the melting pot, a heating device arranged outside the melting pot and adapted to heat and evaporate the evaporation material, and a cooling device adapted to block heat generated by the heating device from transferring to an outside.
Public/Granted literature
- US20060204648A1 Multiple vacuum evaporation coating device and method for controlling the same Public/Granted day:2006-09-14
Information query
IPC分类: