A processor for decontaminating devices is comprised of a chamber for holding devices and a circulation system to circulate a microbial decontamination fluid through the chamber. A water filtration system filters water used in the processor. The water filtration system has a water line connectable to a source of pressurized water. A water decontamination system fluidly communicates with the source of water and the processor. The water decontamination system has a water circulation path and a tank located within the water circulation path. Means are provided to circulate water along the water circulation path through the tank. A gas circulation path fluidly communicates with the tank. Conveying means is provided to convey gas along the gas circulation path through the tank. An ozone producing device is located along the gas circulation path to introduce ozone into gas flowing along the gas circulation path and through the tank.