Invention Grant
US08026173B2 Semiconductor structure, in particular phase change memory device having a uniform height heater
有权
半导体结构,特别是具有均匀的高度加热器的相变存储器件
- Patent Title: Semiconductor structure, in particular phase change memory device having a uniform height heater
- Patent Title (中): 半导体结构,特别是具有均匀的高度加热器的相变存储器件
-
Application No.: US12048121Application Date: 2008-03-13
-
Publication No.: US08026173B2Publication Date: 2011-09-27
- Inventor: Ilya Karpov , Yudong Kim , Ming Jin , Shyam Prasad Teegapuram , Jinwook Lee
- Applicant: Ilya Karpov , Yudong Kim , Ming Jin , Shyam Prasad Teegapuram , Jinwook Lee
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Robert Iannucci
- Priority: EP05108414 20050914
- Main IPC: H01L21/8239
- IPC: H01L21/8239

Abstract:
A phase change memory formed by a plurality of phase change memory devices having a chalcogenide memory region extending over an own heater. The heaters have all a relatively uniform height. The height uniformity is achieved by forming the heaters within pores in an insulator that includes an etch stop layer and a sacrificial layer. The sacrificial layer is removed through an etching process such as chemical mechanical planarization. Since the etch stop layer may be formed in a repeatable way and is common across all the devices on a wafer, considerable uniformity is achieved in heater height. Heater height uniformity results in more uniformity in programmed memory characteristics.
Public/Granted literature
- US20090020743A1 SEMICONDUCTOR STRUCTURE, IN PARTICULAR PHASE CHANGE MEMORY DEVICE HAVING A UNIFORM HEIGHT HEATER Public/Granted day:2009-01-22
Information query
IPC分类: