Invention Grant
US08026197B2 Method and apparatus for manufacturing superconducting tape through integrated process 有权
通过综合工艺制造超导带的方法和装置

Method and apparatus for manufacturing superconducting tape through integrated process
Abstract:
A method and apparatus for manufacturing superconducting tape through an integrated process, including the steps of: heat-treating a substrate wound on a drum in a reaction chamber; continuously depositing components, constituting a buffer layer, a superconducting layer, a contact resistance layer, and a protective layer of the superconducting tape, which are supplied from a deposition chamber, on the substrate; and heat-treating the substrate deposited with the components. The present invention is advantageous in that the unit cost and time for manufacturing a superconducting tape are decreased because all processes for manufacturing a superconducting tape can be performed under the same conditions, the uniformity and performance of a superconducting tape is improved because the same deposition conditions are applied to all of the process for manufacturing a superconducting tape, and a high-quality superconducting tape having high deposition efficiency can be obtained because specific components can be deposited on a large-sized substrate using a drum.
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