Invention Grant
- Patent Title: Phase-change nonvolatile memory and manufacturing method therefor
- Patent Title (中): 相变非易失性存储器及其制造方法
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Application No.: US12292433Application Date: 2008-11-19
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Publication No.: US08026502B2Publication Date: 2011-09-27
- Inventor: Tomoyasu Kakegawa
- Applicant: Tomoyasu Kakegawa
- Applicant Address: JP Tokyo
- Assignee: Elpida Memory, Inc.
- Current Assignee: Elpida Memory, Inc.
- Current Assignee Address: JP Tokyo
- Agency: McGinn IP Law Group, PLLC
- Priority: JPP2007-304332 20071126
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A phase-change nonvolatile memory (PRAM) is constituted of a semiconductor substrate, a lower electrode, a first interlayer insulating film having a first hole, an impurity diffusion layer embedded in the first hole, a second interlayer insulating film having a second hole whose diameter is smaller than the diameter of the first hole, a phase-change recording layer, and an upper electrode. The impurity diffusion layer is constituted of two semiconductor layers having different conductivity types, wherein one semiconductor layer is constituted of a base portion and a projecting portion having a heating spot in contact with the phase-change recording layer, while the other semiconductor layer is formed to surround the projecting portion. A depletion layer is formed in proximity to the junction surface so as to reduce the diameter of the heating spot, thus reducing the current value Ireset for writing data in to the phase-change recording layer.
Public/Granted literature
- US20090134379A1 Phase-change nonvolatile memory and manufacturing method therefor Public/Granted day:2009-05-28
Information query
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