Invention Grant
US08026588B2 Method of wire bonding over active area of a semiconductor circuit
有权
在半导体电路的有源区上引线键合的方法
- Patent Title: Method of wire bonding over active area of a semiconductor circuit
- Patent Title (中): 在半导体电路的有源区上引线键合的方法
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Application No.: US11707827Application Date: 2007-02-16
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Publication No.: US08026588B2Publication Date: 2011-09-27
- Inventor: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
- Applicant: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
- Applicant Address: TW Hsinchu
- Assignee: Megica Corporation
- Current Assignee: Megica Corporation
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery, LLP
- Main IPC: H01L21/60
- IPC: H01L21/60

Abstract:
A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
Public/Granted literature
- US20070273031A1 Method of wire bonding over active area of a semiconductor circuit Public/Granted day:2007-11-29
Information query
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