Invention Grant
- Patent Title: Replacement device for an optical element
- Patent Title (中): 光学元件更换装置
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Application No.: US12029165Application Date: 2008-02-11
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Publication No.: US08027024B2Publication Date: 2011-09-27
- Inventor: Bernhard Gellrich , Ulrich Weber
- Applicant: Bernhard Gellrich , Ulrich Weber
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42

Abstract:
Replacement devices for at least one replaceable optical element mounted at least indirectly in a lithographic projection exposure apparatus are disclosed. Lithography objectives and illumination systems are also disclosed. Methods for positioning a replaceable optical element within a lithographic projection exposure apparatus of this type, and methods for replacing a replaceable optical element within a lithographic projection exposure apparatus via a replacement device are also disclosed.
Public/Granted literature
- US20080174758A1 REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT Public/Granted day:2008-07-24
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