Invention Grant
- Patent Title: Precise positioning system for dual stage switching exposure
- Patent Title (中): 精准的双级开关曝光定位系统
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Application No.: US12299077Application Date: 2006-11-20
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Publication No.: US08027028B2Publication Date: 2011-09-27
- Inventor: Yingsheng Li , Xiaoping Li , Zhiyong Yang , Jun Guan , Shaowen Gao , Wenfeng Sun , Gang Li , Yanmin Cai
- Applicant: Yingsheng Li , Xiaoping Li , Zhiyong Yang , Jun Guan , Shaowen Gao , Wenfeng Sun , Gang Li , Yanmin Cai
- Applicant Address: CN Shanghai
- Assignee: Shanghai Micro Electronics Equipment Co., Ltd.
- Current Assignee: Shanghai Micro Electronics Equipment Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: Rabin & Berdo, PC
- Priority: CN200620044000U 20060718
- International Application: PCT/CN2006/003126 WO 20061120
- International Announcement: WO2008/011766 WO 20080131
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/62

Abstract:
A precise positioning system for dual stage switching exposure, which includes a base, a first wafer stage positioning unit disposed on the base for a pre-processing workstation, and a second wafer stage positioning unit for an exposure workstation. Each of the wafer stage positioning units includes a wafer stage, a motion positioning detector, an X-direction guide bar, and a Y-direction guide bar. The pre-processing workstation and the exposure workstation both have two X-direction guide bars positioned on and movable along the Y-direction guide bars. The X-direction guide bars of adjacent workstations can be connected to each other.
Public/Granted literature
- US20090219503A1 PRECISE POSITIONING SYSTEM FOR DUAL STAGE SWITCHING EXPOSURE Public/Granted day:2009-09-03
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