Invention Grant
US08028567B2 AFM tweezers, method for producing AFM tweezers, and scanning probe microscope
有权
AFM镊子,AFM镊子的生产方法和扫描显微镜
- Patent Title: AFM tweezers, method for producing AFM tweezers, and scanning probe microscope
- Patent Title (中): AFM镊子,AFM镊子的生产方法和扫描显微镜
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Application No.: US12143410Application Date: 2008-06-20
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Publication No.: US08028567B2Publication Date: 2011-10-04
- Inventor: Tatsuya Kobayashi , Masato Suzuki , Masatoshi Yasutake , Takeshi Umemoto
- Applicant: Tatsuya Kobayashi , Masato Suzuki , Masatoshi Yasutake , Takeshi Umemoto
- Applicant Address: JP Takamatsu-shi JP Chiba-shi
- Assignee: AOI Electronics Co., Ltd.,SII Nano Technology Inc.
- Current Assignee: AOI Electronics Co., Ltd.,SII Nano Technology Inc.
- Current Assignee Address: JP Takamatsu-shi JP Chiba-shi
- Agency: Crowell & Moring LLP
- Priority: JP2007-165641 20070622
- Main IPC: G01B5/28
- IPC: G01B5/28 ; G01Q30/20 ; G01Q70/10

Abstract:
AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
Public/Granted literature
- US20090000365A1 AFM Tweezers, Method for Producing AFM Tweezers, and Scanning Probe Microscope Public/Granted day:2009-01-01
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