Invention Grant
- Patent Title: Method for forming magnetic layer, magnetic recording medium, and magnetic recording and reproducing apparatus
- Patent Title (中): 用于形成磁性层的方法,磁记录介质和磁记录和再现装置
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Application No.: US12614999Application Date: 2009-11-09
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Publication No.: US08029651B2Publication Date: 2011-10-04
- Inventor: Takashi Tanaka
- Applicant: Takashi Tanaka
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPP2008-291031 20081113
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
The invention provides a method of forming a magnetic layer with stable magnetic properties and stable recording-and-reproducing properties, by uniformizing the distribution of oxygen radical concentration upon reactive sputtering, and thereby uniformizing the concentration of oxygen to be taken into the magnetic layer along the plane direction. That is, the invention relates to a method of forming a magnetic layer by reactive sputtering, which comprises: placing a substrate in a reaction container; arranging a pair of electrode units comprising sputtering electrodes and targets which are disposed on surfaces of the sputtering electrodes and which contain chromium other than the oxide thereof, so that the electrode units respectively face both sides of the substrate while the targets are on the substrate sides; feeding an argon-water mixture gas to vicinities of the respective surfaces on the substrate sides of the pair of electrode units; and applying reactive sputtering so that the chromium other than the oxide thereof contained in the targets can be made into chromium oxide as a constituent to form the magnetic layer having the granular structure.
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