This publication discloses a method for creating nanoscale formations. According to the method, a filler matrix and first nanoparticles embedded in the filler matrix, and two conductive electrodes are superimposed on the insulating material layer. According to the invention, a voltage is applied between the conductive electrodes, a filler matrix is used and first nanoparticles have substantially different electrical properties in order to induce self-organized localized contact creation when said voltage is applied. Potential applications of the invention include e.g. parallel-plate capacitor structures based on metal-oxide nanoparticles, such as memory cells, and high-permittivity/tunable capacitors.