Invention Grant
- Patent Title: Closed-loop silicon production
- Patent Title (中): 闭环硅生产
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Application No.: US12750566Application Date: 2010-03-30
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Publication No.: US08029756B1Publication Date: 2011-10-04
- Inventor: John C. Schumacher
- Applicant: John C. Schumacher
- Applicant Address: US OR Albany
- Assignee: Peak Sun Sillcon Corporation
- Current Assignee: Peak Sun Sillcon Corporation
- Current Assignee Address: US OR Albany
- Agency: Haynes and Boone, LLP
- Main IPC: C01B33/02
- IPC: C01B33/02 ; C01B33/08
Abstract:
A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.
Public/Granted literature
- US20110243827A1 CLOSED-LOOP SILICON PRODUCTION Public/Granted day:2011-10-06
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