Invention Grant
US08029875B2 Plasma immersion ion processing for coating of hollow substrates 有权
用于涂覆中空基板的等离子浸渍离子处理

Plasma immersion ion processing for coating of hollow substrates
Abstract:
The present disclosure relates to a method for plasma ion deposition and coating formation. A vacuum chamber may be supplied, wherein the vacuum chamber is formed by a hollow substrate having a length, diameter and interior surface. A plasma may be formed within the chamber while applying a negative bias to the hollow substrate to draw ions from the plasma to the interior surface of the hollow substrate to deposit ions onto the interior surface and forming a coating. The coating may have a Vickers Hardness Number (Hv) of at least 500.
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