Invention Grant
- Patent Title: Thin film transistor and method of producing thin film transistor
- Patent Title (中): 薄膜晶体管及薄膜晶体管的制造方法
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Application No.: US12383523Application Date: 2009-03-25
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Publication No.: US08030139B2Publication Date: 2011-10-04
- Inventor: Takeshi Asano , Taishi Takenobu , Masashi Shiraishi
- Applicant: Takeshi Asano , Taishi Takenobu , Masashi Shiraishi
- Applicant Address: JP Nagoya-shi
- Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee Address: JP Nagoya-shi
- Agency: Day Pitney LLP
- Priority: JP2007-040679 20070221
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84

Abstract:
A method of producing a thin film transistor includes a gate electrode formation step that forms a gate electrode on a substrate, a gate insulating layer formation step that forms a gate insulating layer on the substrate in such a manner as to cover the gate electrode formed in the gate electrode formation step, a source/drain electrodes formation step that forms a source electrode and a drain electrode on the gate insulating layer, and a semiconductor layer formation step that applies an aqueous solution for semiconductor layer formation which is an aqueous solution comprising at least a single wall carbon nanotube and a surfactant between the source electrode and the drain electrode formed in the source/drain electrodes formation step by a coating process to form a semiconductor layer comprising the single wall carbon nanotube.
Public/Granted literature
- US20090224292A1 Thin film transistor and method of producing thin film transistor Public/Granted day:2009-09-10
Information query
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