Invention Grant
- Patent Title: Methods of forming DRAM memory cells
- Patent Title (中): 形成DRAM存储单元的方法
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Application No.: US12419014Application Date: 2009-04-06
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Publication No.: US08030168B2Publication Date: 2011-10-04
- Inventor: Brett W. Busch , David K. Hwang , F. Daniel Gealy
- Applicant: Brett W. Busch , David K. Hwang , F. Daniel Gealy
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
The invention includes methods of electrically interconnecting different elevation conductive structures, methods of forming capacitors, methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM, and methods of forming DRAM memory cells. In one implementation, a method of electrically interconnecting different elevation conductive structures includes forming a first conductive structure comprising a first electrically conductive surface at a first elevation of a substrate. A nanowhisker is grown from the first electrically conductive surface, and is provided to be electrically conductive. Electrically insulative material is provided about the nanowhisker. An electrically conductive material is deposited over the electrically insulative material in electrical contact with the nanowhisker at a second elevation which is elevationally outward of the first elevation, and the electrically conductive material is provided into a second conductive structure. Other aspects and implementations are contemplated.
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