Invention Grant
- Patent Title: Composition for stripping and cleaning and use thereof
- Patent Title (中): 用于剥离和清洁的组合物及其用途
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Application No.: US11155654Application Date: 2005-06-20
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Publication No.: US08030263B2Publication Date: 2011-10-04
- Inventor: Matthew I. Egbe , Michael Walter Legenza , Thomas Michael Wieder , Jennifer May Rieker
- Applicant: Matthew I. Egbe , Michael Walter Legenza , Thomas Michael Wieder , Jennifer May Rieker
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian; Anne B. Kiernan
- Main IPC: C11D7/50
- IPC: C11D7/50
Abstract:
A composition comprising one or more water soluble organic solvents comprising a glycol ether; water; a fluoride containing compound provided that if the fluoride containing compound is ammonium fluoride than no additional fluoride containing compound is added to the composition; optionally a quaternary ammonium compound; and optionally a corrosion inhibitor is disclosed herein that is capable of removing residues from an article such as photoresist and/or etching residue. Also disclosed herein is a method for removing residues from an article using the composition disclosed herein.
Public/Granted literature
- US20060014656A1 Composition for stripping and cleaning and use thereof Public/Granted day:2006-01-19
Information query
