Invention Grant
- Patent Title: Pixel structure and fabricating method thereof
- Patent Title (中): 像素结构及其制造方法
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Application No.: US12055326Application Date: 2008-03-26
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Publication No.: US08030652B2Publication Date: 2011-10-04
- Inventor: Ming-Hung Shih , Shih-Chin Chen
- Applicant: Ming-Hung Shih , Shih-Chin Chen
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW96132010A 20070829
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10 ; H01L31/00

Abstract:
A pixel structure and a fabrication method thereof are provided. A substrate with a light-shielding layer and a flat layer formed thereon is provided. A first photomask process is conducted to pattern a first metal layer and a semiconductor layer for forming a source, a drain, a channel layer, a data line and a first pad. A second photomask process is conducted to pattern the protection layer, the second metal layer and the gate dielectric layer for forming a gate, a scan line and a second pad, and a part of the drain is exposed. A third photomask process is conducted to pattern a transparent conductive layer for forming a pixel electrode.
Public/Granted literature
- US20090057666A1 PIXEL STRUCTURE AND FABRICATING METHOD THEREOF Public/Granted day:2009-03-05
Information query
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