Invention Grant
- Patent Title: Thin film transistor, display device having thin film transistor
- Patent Title (中): 薄膜晶体管,具有薄膜晶体管的显示装置
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Application No.: US12326495Application Date: 2008-12-02
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Publication No.: US08030655B2Publication Date: 2011-10-04
- Inventor: Shunpei Yamazaki
- Applicant: Shunpei Yamazaki
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2007-312879 20071203
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L31/036 ; H01L31/112

Abstract:
A thin film transistor with excellent electric characteristics, a display device having the thin film transistor, and a method for manufacturing the thin film transistor and the display device in a high yield are provided. In the thin film transistor, a gate electrode, a gate insulating film, crystal grains that mainly contain silicon and are provided for a surface of the gate insulating film, a semiconductor film that mainly contains germanium and covers the crystal grains and the gate insulating film, and a buffer layer in contact with the semiconductor film that mainly contains germanium overlap with one another. Further, the display device has the thin film transistor.
Public/Granted literature
- US20090140259A1 THIN FILM TRANSISTOR, DISPLAY DEVICE HAVING THIN FILM TRANSISTOR, AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-06-04
Information query
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