Invention Grant
- Patent Title: Mesa-type photodetectors with lateral diffusion junctions
- Patent Title (中): 具有横向扩散结的Mesa型光电探测器
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Application No.: US12174079Application Date: 2008-07-16
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Publication No.: US08030684B2Publication Date: 2011-10-04
- Inventor: Syn-Yem Hu , Zhong Pan
- Applicant: Syn-Yem Hu , Zhong Pan
- Applicant Address: US CA Milpitas
- Assignee: JDS Uniphase Corporation
- Current Assignee: JDS Uniphase Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Pequignot + Myers LLC
- Agent Matthew A. Pequignot
- Main IPC: H01L31/107
- IPC: H01L31/107

Abstract:
The present invention relates to a stable mesa-type photodetector with lateral diffusion junctions. The invention has found that without resorting to the complicated regrowth approach, a simple Zn diffusion process can be used to create high-quality semiconductor junction interfaces at the exposed critical surface or to terminate the narrow-bandgap photon absorption layers. The invention converts the epi material layers near or at the vicinity of the etched mesa trench or etched mesa steps into a different dopant type through impurity diffusion process. Preferably the diffused surfaces are treated with a subsequent surface passivation. This invention can be applied to both top-illuminating and bottom-illuminating configurations.
Public/Granted literature
- US20090020841A1 Mesa-Type Photodetectors With Lateral Diffusion Junctions Public/Granted day:2009-01-22
Information query
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