Invention Grant
US08030690B2 Device sensitive to a movement comprising at least one transistor
有权
对包括至少一个晶体管的运动敏感的装置
- Patent Title: Device sensitive to a movement comprising at least one transistor
- Patent Title (中): 对包括至少一个晶体管的运动敏感的装置
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Application No.: US12300715Application Date: 2007-05-16
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Publication No.: US08030690B2Publication Date: 2011-10-04
- Inventor: Eric Ollier , Laurent Duraffourg , Philippe Andreucci
- Applicant: Eric Ollier , Laurent Duraffourg , Philippe Andreucci
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR0651822 20060518
- International Application: PCT/EP2007/054775 WO 20070516
- International Announcement: WO2007/135064 WO 20071129
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8) and channel (12).
Public/Granted literature
- US20090321793A1 DEVICE SENSITIVE TO A MOVEMENT COMPRISING AT LEAST ONE TRANSISTOR Public/Granted day:2009-12-31
Information query
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