Invention Grant
- Patent Title: Local charge and work function engineering on MOSFET
- Patent Title (中): MOSFET的局部充电和工作功能工程
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Application No.: US12424170Application Date: 2009-04-15
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Publication No.: US08030718B2Publication Date: 2011-10-04
- Inventor: Huan-Tsung Huang , Shyh-Horng Yang , Yuri Masuoka , Ken-Ichi Goto
- Applicant: Huan-Tsung Huang , Shyh-Horng Yang , Yuri Masuoka , Ken-Ichi Goto
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor substrate having a source region and a drain region, defining a first dimension from the source to drain; and a gate stack disposed on the semiconductor substrate and partially interposed between the source region and the drain region. The gate stack includes a high k dielectric layer disposed on the semiconductor substrate; a first metal feature disposed on the high k dielectric layer, the first metal gate feature having a first work function and defining a second dimension parallel with the first dimension; and a second metal feature having a second work function different from the first work function and defining a third dimension parallel with the first dimension, the third dimension being less than the second dimension.
Public/Granted literature
- US20100065925A1 LOCAL CHARGE AND WORK FUNCTION ENGINEERING ON MOSFET Public/Granted day:2010-03-18
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