Invention Grant
US08031754B2 Surface emitting laser element, surface emitting laser element array, method of fabricating a surface emitting laser element 有权
表面发射激光元件,表面发射激光元件阵列,制造表面发射激光元件的方法

Surface emitting laser element, surface emitting laser element array, method of fabricating a surface emitting laser element
Abstract:
A surface emitting laser element that includes a cylindrical mesa post in which a plurality of semiconductor layers including an active layer is grown and that emits a laser light in a direction perpendicular to a substrate surface, the surface emitting laser element including a dielectric multilayer film on a top surface of the mesa post in at least a portion over a current injection area of the active layer; and a dielectric portion that includes layers fewer than layers of the dielectric multilayer film and that is arranged on a portion excluding the portion over the current injection area on the top surface of the mesa post and on at least part of a side surface of the mesa post.
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