Invention Grant
- Patent Title: Printed fourier filtering in optical inspection tools
- Patent Title (中): 光学检测工具中的印刷光栅过滤
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Application No.: US11410276Application Date: 2006-04-24
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Publication No.: US08031931B2Publication Date: 2011-10-04
- Inventor: Dan T. Fuchs , Shai Silberstein
- Applicant: Dan T. Fuchs , Shai Silberstein
- Applicant Address: SG Singapore
- Assignee: Applied Materials South East Asia Pte. Ltd.
- Current Assignee: Applied Materials South East Asia Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: SNR Denton US LLP
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
A spatial mask printer may be used in conjunction with an optical inspection tool. The tool can be used to obtain a Fourier image of an inspected object, and a filter mask image can be designed to block certain aspects of the object's image in the Fourier plane corresponding to repetitive aspects of the imaged object. The filter mask image can then be printed and used in the tool during the inspection process. The mask image may be designed by hand or by computer and may be stored for later use. Filters may be automatically placed into the optical path of the inspection tool by a filter wheel, or may be housed in other filter banks. The printer may be configured to operate in a clean room environment, and may be integrated into the optical inspection tool.
Public/Granted literature
- US20070247668A1 Printed fourier filtering in optical inspection tools Public/Granted day:2007-10-25
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