Invention Grant
- Patent Title: High density flash memory device and fabricating method thereof
- Patent Title (中): 高密度闪速存储器件及其制造方法
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Application No.: US12312717Application Date: 2007-11-19
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Publication No.: US08035157B2Publication Date: 2011-10-11
- Inventor: Jong-Ho Lee
- Applicant: Jong-Ho Lee
- Applicant Address: KR Seoul
- Assignee: SNU R&DB Foundation
- Current Assignee: SNU R&DB Foundation
- Current Assignee Address: KR Seoul
- Agency: The Nath Law Group
- Agent Jerald L. Meyer; Sungyeop Chung
- Priority: KR10-2006-0117296 20061125
- International Application: PCT/KR2007/005801 WO 20071119
- International Announcement: WO2008/062974 WO 20080529
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
The present invention provides a flash memory device having a high degree of integration and high performance. The flash memory device has a double/triple gate structure where a channel is formed in a wall-shaped body. The flash memory device has no source/drain regions. In addition, although the flash memory device has the source/drain regions, the source/drain region are formed not to be overlapped with a control electrode. Accordingly, an inversion layer is induced by a fringing field generated from the control electrode, so that cell devices can be electrically connected to each other. The flash memory device includes a charge storage node for storing charges formed under the control electrode, so that miniaturization characteristics of cell device can be improved. According to the present invention, there is proposed a new device capable of improving the miniaturization characteristics of a MOS-based flash memory device and increasing memory capacity.
Public/Granted literature
- US20100052043A1 HIGH DENSITY FLASH MEMORY DEVICE AND FABRICATING METHOD THEREOF Public/Granted day:2010-03-04
Information query
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